Abstract
The deuterium plasma parameters of a miniature Penning discharge ion source have been measured by a single probe. Electron temperature and electron density can be acquired from the I-V curves. The results show that electron temperature increases and electron density decreases with the probe tip departing from the centre of plasma area. Meanwhile, both electron temperature and electron density increase with increase in discharge current. Electron temperature is about 1.8 ~ 7.1 eV and electron density is about 2.7 χ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">14</sup> - 3.7 χ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">15</sup> m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> , when the distance between the probe tip and the centre of plasma area varies from 1 to 6 mm. Electron temperature is about 5.7 - 12.5 eV and electron density is about 6.7 χ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">14</sup> - 2.2 χ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">15</sup> m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> , when discharge current varies from 50 to 200 μA. The results can provide useful information for the design and operation of Penning ion sources.
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