Abstract
A device for the precise shape correction of optical surfaces of any irregular shape (convex, concave) up to 300 mm in diameter by means of ion-beam and reactive plasma etching is described. The possibilities of the device allow the fabrication of optical elements with a root-mean-square deviation from the desired shape on the level of 0.3 to 1.0 nm.
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More From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
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