Abstract

The ion-polishing method is applied to the fabrication of Ni/Ti and Ni/Mn multilayers in combination with an Ar + ion-beam sputtering deposition. The influences of the ion-polishing time, the ion-acceleration energy and the incident angle of ions on the interface roughness between layers were investigated using a high-resolution transmission electron microscopy (TEM). The TEM result showed the remarkable decrease of the interface roughness of Ni/Ti and Ni/Mn multilayers by ion polishing. Ion-polished multilayer mirrors have shown high reflectivities in X-ray and neutron reflectometries. The half-length in the upstream side of the nickel guide tube, which was installed at the thermal beam hole of the JRR-3M at JAERI has been replaced by a supermirror guide tube with a critical angle of 2 θ cNi. The result showed a remarkable increase in the neutron intensity at the exit of the neutron guide tube.

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