Abstract
The reflectivity of multilayer mirrors depend on the interface roughness created during deposition of the layers. In order to smoothen the interfaces, we have investigated the influence of argon ion bombardment on the interface roughness of a Ni/Ti multilayer deposited by ion beam sputtering. The dependencies of ion polishing time, ion acceleration energy and incident angle on the interface roughness were studied to optimize the conditions of Ar + ion polishing. It was observed that the reflectivities and the evaluated interface roughness of multilayers are obviously improved by using ion polishing.
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