Abstract
We have developed a very large volume, high-density helicon plasma source, 75 cm in diameter and 486 cm in axial length; full width at half maximum of the plasma density is up to ∼42 cm with good plasma uniformity along the z axis. By the use of a spiral antenna located just outside the end of the vacuum chamber through a quartz-glass window, plasma can be initiated with a very low value of radio frequency (rf) power (<1 W), and an electron density of more than 1012 cm−3 is successfully produced with less than several hundred Watt; achieving excellent discharge efficiency. It is possible to control the radial density profile in this device by changing the magnetic field configurations near the antenna and/or the antenna radiation-field patterns.
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