Development of a strong field helicon plasma source

Abstract

We developed a high-density helicon plasma source with a very strong field of up to 10kG. Using a double-loop antenna wound around a quartz tube, 9.5cm in inner diameter and 90cm in axial length, initial plasmas with a high density more than 1013cm−3 were successfully produced with a radio frequency power less than a few kilowatts, and with changing magnetic fields, fill pressures, and gas species.