Abstract
Two-color resonant laser ionization sputtered neutral mass spectrometry offers high elemental selectivity. In this study, two-color resonance ionization in sputtered neutral Sr was confirmed by combining a grating type Ti:sapphire laser system and a time-of-flight secondary ion mass spectrometry (TOF-SIMS) system. The authors compared the ionization efficiencies of Sr of the two-color three-photon ionization scheme 1 (first step: 460.862 nm; second step: 767.519 nm) and the two-color two-photon ionization scheme 2 (first step: 460.862 nm; second step: 405.200 nm). The resonant ionization efficiency of the latter was found to be 50 times larger than that of the former. Finally, the authors mapped the microarea distribution of Sr by two-color resonant ionization sputtered neutral mass spectrometry.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
