Abstract

The transfer robot using for small flat panel display manufacturing process is developed. Requirement for transfer robot such as minimization of deflection and lateral vibration is achieved by enhancement of stiffness of arm and hand by finite element analysis. Arrangement of reduction gear is designed to increase stiffness and decrease position error at the end point of arm. The repeatability of arm is improved by applying the precision control method. Experiment is conducted to verify the performance of developed transfer robot. From the performance test, developed transfer robot has repeatability of under ±0.1mm, deflection of 2mm, straightness of under ±1.5mm, and velocity of 1500mm/sec.

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