Abstract
This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth.
Highlights
In recent years, there has been an increasing demand for a method that can measure the accuracy of micro-holes in fuel injector nozzles, nozzles for spinning chemical fibers, optical fiber ferrules, medical devices, mechanical micro-parts, micro-electromechanical systems, micro-molds, optical devices, semiconductors, etc
Many studies have been reported on micro-hole measurement techniques employing a variety of probes such as optical probes [1,2,3], vibroscanning probes [4,5], vibrating probes [6,7,8,9,10,11,12], tunneling effect probes [12,13], opto-tactile probes [14], fiber probes [15,16], optical trapping probes [17], and diaphragm or flexure based probes using an elastic mechanism [18,19,20,21,22,23,24,25,26,27]
This paper presents a system for micro-hole measurement using an optical fiber stylus; this stylus is a type of displacement-measuring probe with low contact force and a wide measuring range; this stylus is easy to fabricate
Summary
There has been an increasing demand for a method that can measure the accuracy of micro-holes in fuel injector nozzles, nozzles for spinning chemical fibers, optical fiber ferrules, medical devices, mechanical micro-parts, micro-electromechanical systems, micro-molds, optical devices, semiconductors, etc. This paper presents a system for micro-hole measurement using an optical fiber stylus; this stylus is a type of displacement-measuring probe with low contact force and a wide measuring range; this stylus is easy to fabricate. Because the proposed probe measures the deflection amplitude of the stylus shaft using a laser-based non-contact method, the stylus shaft need not be rigid; this principle applies to styluses with much smaller diameters and longer lengths.
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