Abstract
Three-dimensional medium-energy ion scattering (3D-MEIS) equipped with a large detector has been developed for crystallographic structural and elemental analysis of materials. Backscattering experiments have been made for a Si(001) sample at the geometry that the range of the scattering angle is as large as ±17.5°. Clear blocking shadows were observed together with belt-like shadow aggregations. A low yield spot not relevant to a blocking cone appears, but it can be excluded from the blocking pattern by changing the detection geometry. The results indicate that 3D-MEIS using a large solid angle detector is promising for crystallographic material analysis.
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