Abstract
A calibration facility based on gravimetric method has been developed at NRLM for small mass flow rates of gas. This calibration facility establishes a primary gas flow rate measurement standard in Japan with an extended standard uncertainty of 0.12 percent at maximum, in mass flow rates from 0.01 g/min to 50 g/min for nitrogen. Five sonic Venturi nozzles were tested using this facility and the results showed that they can work well as a flow transfer standard for small mass flow rates. These sonic Venturi nozzles can be used to establish flow transfer standards within an extended standard uncertainty of 0.15 percent.
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