Abstract
We have been developing superconducting tunnel junctions (STJs) for neutron detector on a Si-Li2B4O7 (LBO) hybrid substrate. An active area of each STJ was limited by dicing in order to obtain high spatial resolution. The Si-LBO hybrid substrate was bonded by a surface-activated room-temperature bonding. In this bonding method, the Si and LBO surfaces were sputter-etched by high energy Ar ion beam and bonded in a vacuum. We fabricated STJs on the Si-LBO hybrid substrate and measured their current-voltage characteristic. Their leakage currents (Ileak) were < 10 nA, and so we succeeded in fabricating STJs on the Si-LBO hybrid substrate, which can be expected to operate as neutron detectors with high performance.
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