Abstract
A size-selected gas cluster ion beam (GCIB) system has been developed to study the size effects of energetic cluster ion bombardments on a solid surface. As the typical atomic mass of gas cluster ions exceeds 400,000amu (10,000 Ar atoms/ion), it had been quite difficult to realize a size-selected GCIB irradiation system. In this study, a bending magnet was employed for mass separation, so that the ion current is sufficient for surface processing. The width of the cluster size distribution, after the magnetic filter, was 400atoms/cluster, which is 1/20 of the original cluster size distribution. With the size-selected GCIB irradiation system, it was found that the damaged layer thickness of Si substrates dramatically decreased with increasing the cluster size. This result was in good agreement with that obtained from molecular dynamics simulations.
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