Abstract
A novel surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on a 128° YX LiNbO 3 piezoelectric substrate. The developed sensor was composed of a SAW resonator, metallic dots, and two SAW delay lines. A SAW resonator was employed to generate a stable standing wave with a large amplitude, metallic dots were used to induce a Coriolis force and to form a secondary SAW, and two delay lines were formed to extract the Coriolis effect by comparing the resonance frequencies between these two delay lines. Coupling of modes (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, resonant frequency differences between the two oscillators were observed because of the secondary wave, generated by the Coriolis force, perturbed the propagation of the SAW in the sense element. Depending on the angular velocity, the difference of the resonance frequency was linearly modulated. The obtained sensitivity was approximately 172 Hz deg −1 s −1 at an angular rate range of 0–500 deg/s. Device performances depending on different mass weights and temperatures were also characterized. Good thermal and shock stabilities were observed during the evaluation process.
Published Version
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