Development of Poly(Phenylene)-Based Materials for Thin Film Applications: Optical Waveguides and Low Dielectric Materials

Abstract

Abstract We have synthesized and evaluated poly(phenylene)-based materials made via spin-coatable polymeric precursors for such thin film applications as optical waveguides and low dielectric materials. Poly(phenylene) precursors were prepared by radical polymerization of cyclohexadiene-1, 2-diol derivatives containing various leaving groups. The precursors were converted into poly(phenylene) either by curing at 300°C or by deep-UV exposure in the presence of a photoacid generator. Poly(phenylene) has a number of desirable properties including good near-IR transmission, low dielectric constant, thermal and environmental stability, low water absorption, and ease of pattern fabrication using microlithographic techniques. Copolymer precursors based on 1,2-diaceto-3,5-cyclohexadiene and styrene derivatives as well as copolymers with Nsubstituted maleimide derivatives were prepared by radical copolymerization. The copolymer precursors were converted into poly(phenylene) copolymers either by annealing at 300°C ...