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Abstract
Piezoelectric actuator is used for the period of time will cause the fading of efficacy. Hence, it is an important issue about providing convenient, fast and accurate calibration mode. In the past, the values of calibration parameters are record by manual. Therefore, this method will cause the risk of personal errors. In this investigation, a self-developed automatic calibration system for piezoelectric actuator is proposed. The automatic calibration system integrated with the measurement software processing module, scheme of interferometer system, piezoelectric actuator and the voltage amplifier has been employed for the calibrating of piezoelectric actuator parameters, e.g. hysteresis and maximum stroke. Comparison experiments between the calibration parameters results of self-developed interferometer system and Renishaw RLE-10 system reveal that the maximum stroke error is 13.3% and the maximum hysteresis error is 14.6%.These results are all in the error range which is provided by the firm.
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