Abstract

This study describes an immobilization method of enriched microorganism, for robustly degrading organic compounds, including tetramethyl ammonium hydroxide (TMAH) in electronics wastewater without an increase of total organic carbon (TOC) in effluent. The enriched TMAH degrading bacteria was entrapped inside the pellets through polymerization. Polymerization conditions were optimized in terms of long-term TOC leak tests of pellet. Among several methods, a differential scanning calorimetry (DSC) analysis was found to be effective for the hands-on evaluation of stability in pellet. Stable pellets showed less than 10 J/g of curing heat by DSC analysis. This method is suitable for the optimization of polymerization conditions and controlling the quality of pellets. The removal efficiency of TMAH was over 95% and effluent concentration of TOC was below 100 ppb. The viability test results revealed that entrapped microorganisms were actively survived after five months of operations. This immobilization method is strongly suggested as a new strategy for the wastewater reuse process in low-strength electronics wastewater.

Highlights

  • Semiconductor and display manufacturer in the electronics industry consume large quantities of process water with extremely high purity and produce as much wastewater with complex composition

  • Low-strength electronics wastewater is produced by rinsing of residual etchant and organic solvent such as tetramethyl ammonium hydroxide (TMAH) and isopropyl alcohol (IPA)

  • We evaluated the performance of a biological process using stable highly cross-linked pellets immobilized TMAH degrading bacteria for the treatment of low-strength electronics wastewater

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Summary

Introduction

Semiconductor and display manufacturer in the electronics industry consume large quantities of process water with extremely high purity (ultrapure water, UPW) and produce as much wastewater with complex composition. The limited surface water supply in Korea caused a significant water scarcity issue demanding wastewater reuse. The complex composition of persistent organic compounds and higher operating expense limit application of wastewater reuse in electronics industry [1]. High-strength wastewater contains various kinds of etchants and organics solvents with high concentrations. Low-strength electronics wastewater is produced by rinsing of residual etchant and organic solvent such as tetramethyl ammonium hydroxide (TMAH) and isopropyl alcohol (IPA). The composition of this wastewater is relatively less complex and, the treatment process could be simpler than high-strength wastewater. Low-strength wastewater treatment for reuse is getting more attention and electronics manufacturers tend to separate low-strength wastewater from high-strength wastewater [2,3]

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