Abstract
This study aims to develop the CMP pads that have new groove pattern as control the slurry flow. We have been proposed two type groove patterns as inflow type and outflow type. Here, it is well known that the slurry flow is remarkably important as both to use the slurry effectively and to reduction the slurry quantity consumed of CeO2 abrasive that is one of rare metals. This paper describes the effect of groove pattern on the slurry flow from the observation image with high-speed camera. In particular, the slurry flow is quantitatively visualized by digital image processing. As a result, the several advantages of both proposed inflow type and outflow type show from a view point of slurry flow compared to the conventional XY-groove pad and No-groove pad.
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