Development of New Preparation System for Highly Sensitive Flammable Gas Sensor

Abstract

A new deposition system for preparing a highly sensitive flammable gas sensor has been developed. In this method, tin oxide (SnO2) thin films were deposited on Si(100) and Al2O3 substrates using the pulsed Nd:YAG (532 nm) laser deposition (PLD) method and palladium (Pd) thin films were deposited on the same substrate using d.c. sputtering simultaneously. Experimental results suggest that Pd-doped SnO2 thin films can be prepared using this new method. The sensitivity of the Pd-doped SnO2 film sensor prepared using this new deposition system is about 3.2 times higher than that of a pure SnO2 film sensor prepared by the conventional PLD method.