Abstract
In this study, we look into an innovative technology that utilizes nanoparticles as a medium for imprinting. This technology integrates the advantages of soft lithography, photo-cure resist, and gas assisted imprinting. We try to produce ridge waveguides and microlens arrays by gas-assisted nanoparticle-based soft mould imprinting on photo-cure resists. It helps the application and technology of nano-imprinting becoming more sophisticated. We find that PDMS can be used to precisely replicate micro-to-nanometer level microstructures. Together with nanoparticles and well-proportioned gas pressure, we can construct a perfect shape of microstructures and achieve a conformal contact with the surface of base material. It increases the effective imprinting area significantly and improves the replication capability of the transfer. Meanwhile, the PDMS soft mould is easy for production and fast in replication, which reduces the cost remarkably. Furthermore, it has a low surface free energy and low viscosity to the resists. Integrating gas-assisted nanoparticle imprinting can be a great advantage in the process of microstructure.
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