Abstract
AbstractWe developed a Micro Electro‐Mechanical Systems ultrasonic array sensor that is capable of detecting 1 MHz airborne ultrasonic waves for use in devices for inspecting the interior of objects. The sensor is an array of vibrating membranes, each consisting of a metal lower electrode, a platinum upper electrode, and a polymer ferroelectric layer between them. In this study, two kinds of electrode materials, aluminum or gold, were used for the lower electrode to investigate how they affect the characteristics of such high resonant‐frequency sensors. The sensor using aluminum showed about four times better sensitivity than that using gold.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
