Abstract
This research shows the realization of 2.4-GHz film bulk acoustic wave FBAW filters. The design, simulation, fabrication, mea- surement, and analysis of the film bulk acoustic wave resonator FBAR devices are covered, which is helpful for the manufacture of the FBAR devices. The simulation of the FBAR and RF circuitry can be integrated on a single platform. The fabrication of the FBAW filters is compatible with complementary metal-oxide semiconductors. This device can be used in 2.4-GHz bandpass filters, such as 802.11b/g and Bluetooth. In this research, the 2.4-GHz FBAW filters for wireless communication have been accomplished. The fabricated FBAW filters have insertion loss of 10 dB, return loss of 7 dB, and stopband rejection of 25 dB, central frequency of 2.485 GHz, bandwidth of 60 MHz, and size of 0.5 mm0.5 mm. © 2009 Society of Photo-Optical Instrumentation Engineers.
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