Abstract
We are developing X-ray microcalorimeters using transition edge sensors (TES) for high resolution x-ray spectroscopy. Microcalorimeters are thermal detectors which measure the energy of an incident x-ray photon using a TES thermometer operated at a sharp transition edge between normal and superconducting states. TES microcalorimeters can achieve faster response than conventional microcalorimeters by keeping the operating point of TES in the transition region through the use of strong negative electrothermal feedback (ETF).We developed a bilayer TES where a normal metal Au was deposited on a superconductor Ir in order to improve the thermal conductivity of the Ir-TES. We investigated resistance-temperature characteristics. As a result, it showed a very sharp transition within 1 mK at the temperature of 110 mK. The energy resolution of 9.4 eV (FWHM) was achieved for a 5899 eV Mn Kal line.
Published Version
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