Abstract

This paper presents the design, fabrication and characterization of temperature microsensors based on Resistance Temperature Detectors (RTDs) with a meander-shaped geometry. Numerical simulations were performed for studying the sensitivity of the RTDs according to their windings numbers as well as for optimizing their layout. These RTDs were fabricated using well-established microfabrication and photolithographic techniques. The fabricated sensors feature high sensitivity (0.3542 mV/°C), linearity and reproducibility in a temperature range of 35 to 45 °C. Additionally, each sensor has a small size with a strong potential for their integration in microfluidic devices, as organ-on-a-chip, allowing the possibility for in-situ monitoring the physiochemical properties of the cellular microenvironment.

Highlights

  • The recent advances in tissue-culture techniques, in biomaterials and in lab-on-a-chip (LOC) technologies have promoted the development of organs-on-a-chip (OoC)

  • The temperature in the cell culture could be affected by the difference between in the set point defined in the incubator and the in situ temperature in the cell culture

  • The small size of temperature sensors based on Resistance Temperature Detectors (RTDs) as well as their easy integration make them excellent candidates for applications in microfluidic-based devices, such as OoC

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Summary

Introduction

The recent advances in tissue-culture techniques, in biomaterials and in lab-on-a-chip (LOC) technologies have promoted the development of organs-on-a-chip (OoC). A wide variety of human OoC models have been created [4,5,6,7,8], there is a lack of miniaturized multisensory systems integrated in the OoC [9] These integrated systems are essential to real-time monitoring of the physicochemical properties and keep a well-controlled microenvironment to provide optimal conditions for cultured cells and/or organ models, mimicking the human body. They allow evaluation of the toxicological effect of drugs and nanomaterials developed for biomedical applications, by delivering those drugs to the organ model, as well as to assess the dynamic responses of the OoC to pharmaceutical compounds for long-term studies, providing an accurate prediction of human organs reactions [7].

Design and Sensing Principle of the Temperature Microsensor
Fabrication Process
Eletrical Characterization Setup
Calibration of Temperature Microsensors
Conclusions
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