Abstract
This paper reports the development of high volume fraction SiCP/Al composite-bismuthate glass multilayer films optics Au-mirror with high reflectivity in a wavelength range of 760 to 1000 nm. Multilayer films were fabricated using an radio frequency-magnetron sputtering deposition system. The measured reflectivity of Ta2O5/SiO2/Au/Cr metal plus dielectric films optics Au-mirror could reach up to ≥97%. Then, on the basis of experiments, a Φ75-mm high volume fraction SiCP/Al composite-bismuthate glass multilayer optical Au-mirror for a wavelength range of 760 to 1000 nm was manufactured. The tested results indicate that a peak-to-valley value of 0.854λ (λ=632.8 nm) was achieved on the Au-mirror surface, and the slope deviation error for the flat surface was lower than 0.153λ root mean square. The surface roughness of Ta2O5/SiO2/Au/Cr multilayer thin films was 1.30 nm (Ra).
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