Abstract
利用脉冲激光沉积法在LaNiO3/LaAlO3（001）基片上生长了Ba0.6Sr0.4TiO3（BST）和Ba（Zr0.2Ti0.8）O3（BZT）单层薄膜,以及Ba（Zr0.2Ti0.8）O3/Ba0.6Sr0.4TiO3/Ba（Zr0.2Ti0.8）O3（BZT/BST/BZT）多层薄膜.X射线衍射（XRD）分析发现,BST、BZT和LNO薄膜都具有高度的（00l）取向.原子力显微镜（AFM）显示三种样品表面光滑无裂纹,晶粒尺寸和表面粗糙度相当.电容测试表明,相对BST、BZT单层薄膜,多层薄膜具有最大的品质因数42.07.表明多层薄膜在微波应用中具有很大的潜力.
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