Abstract
Nanotechnology is widely adapted in many industries for various applications such as manufacture of computer disks, semiconductor devices, medicine, biotechnology and so on. To manufacture such systems, nanopositioning stages are extremely critical as they deliver accuracies up to a few nanometres required in such ultra precise process. Nanopositioning stages are widely used as positioning systems in nanotechnology applications such as lithography, high-end microscopes, testing equipments, etc. The proposed work is aimed to design, fabrication and implementation of closed loop three directional flexure-based nanopositioning stage with improved positioning accuracies. The main challenge for designing a nanopositioning system is to minimise the non-linearities, cross-talk and hysteresis to achieve nanometric motions and to provide high bandwidth for scanning operation through closed loop operation. The static and dynamic testing results of nanopositioning stage shows that system can be used for high speed scanning applications.
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