Abstract
The hysteresis and nonlinearity of the PZT is an actual problem in the piezo-driven micro-/nano-positioning stage, especially for the open-loop positioning stage. The study presents the development of an NI cRIO9074-based real-time closed-loop micro-/nano-positioning system, to overcome the problem of the hysteresis and nonlinearity of a PZT and to increase the positioning speed of the positioning stage. The developed system mainly consists of a piezoelectric actuator, a bridge-type hinge mechanism for displacement magnification, a micro-/nano-positioning stage body, a capacitive sensor system, an NI cRIO9074 real-time control unit with FPGA chip and a PC. After executing the optimization analysis of the displacement, stress and the frequency, using the ANSYS software, the dimensions of the stage body have been designed and determined. A set of software written with the LabView programming language was developed to construct the real-time PID closed-loop control of the developed positioning system. Based on the test results, the designed closed-loop micro-/nano-positioning system was capable of precision positioning within the travel of 119.08 µm with maximum stage tilting angle at 25 µrad. The steady-state positioning deviation of the stage is about ±2 nm in the step-positioning test. In the transient slope-tracing test at a tracing speed of 5 µm s−1, an error of about ±100 nm is observed.
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