Abstract
As a critical component of ultra-high flux gene sequencing imaging system, high speed and high precision stepping scanning platform is used to carrying the gene chips to be measured, and it is also the core component for ensuring the high flux and high accuracy of sequencing instrument. In this paper, taking the high speed and high precision stepping scanning platform in ultra-high flux gene sequencing imaging system as design objective, the research work is carried out from three aspects, i.e., the design of platform overall architecture, the design of dynamic response analysis on system-level structure, and the design of high precision positioning control system, utilizing the optimized design of coupling topology between continuum and discrete body, the high precision vibration test and modal analysis method, variable structure anti-saturation precision control, as well as other key techniques. Finally, a high speed and high precision stepping scanning platform of long-stroke is developed successfully, with stepping speed of 200mm/s, stepping acceleration of 9.8m/s2, stable stepping control precision of 150nm, stable stepping duration of 100ms, and the total stepping stroke of 200mm. It lays a solid foundation for the popularization and application of stepping scanning platform in ultra-high gene sequencing instrument.
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