Development of graphene drum resonator with nanocavity by low-pressure dry transfer technique

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We developed cavity-sealed single-layer graphene drum resonator by using low-pressure dry transfer technique, without using sacrificial layer etching process. Maximum diameter of 45 μm with gap length of 810 nm was obtained. Raman spectra of suspended graphene was found to be 2D/G ratio of 1.73 and few D peak. A dry transfer technique provides the flat device surface with sealed nanocavity, which can be used up to 6 μm in diameter for standard photolithography to pattern graphene and Ti/Au electrodes. We demonstrated fundamental resonance frequency ranges of 0.74–1.36 MHz with a quality factor of about 300 with 30–45 μm in diameter.