Abstract
Aluminum-alloy chambers treated with newly developed mirror-polishing technique (organo-mechanochemical polishing) have been constructed and their vacuum properties have been tested. The one evacuated tandem with two turbo-molecular pumps (TMP: 340 l s −1 + 60 l s −1) reached a value of 1.5 x 10 −9 Pa in 48 h of initial evacuation, which is one of the lowest pressures attained by TMPs only, in view of the rather large volume (22 l) and the surface area (5.7 x 10 3 cm 2) of the chamber and the smaller pumping speed (114 l s −1) of the evacuating system. The other chamber equipped with specially designed titanium sublimation pump in addition to TMPs attained a pressure as low as 4.9 x 10 −11 Pa, which includes a possibility of reaching 9 x 10 −12 Pa if we accept a published value of 4 x 10 −11 Pa for the ESD error of extractor gauge in this range.
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