Development of DMD Reflection-Type CCD Camera for Phase Analysis and Shape Measurement

Abstract

Phase-shifting method effectively attains high resolution and high accuracy in analyzing phase information on a projected grating. It is difficult to apply dynamically, however, because it usually requires several images. We developed a camera based on digital micromirror device (DMD) technology for high-speed phase analysis and shape measurement, called a DMD reflection-type CCD camera or DMD camera. Implementing DMD technology enables accurate control of intensity reaching the imaging detector of a camera. Moiré is used to adjust pixel-to-pixel correspondence highly accuracy. We introduce a controllable high-speed DMD operation board to control DMD mirrors at high-speed, so each DMD mirror operates as a controllable high-speed shutter for the corresponding CCD pixel. In experiments with an application, we conducted DMD integrated phase-shifting method using correlation to analyze phase distributions of projected gratings from images recorded by the DMD camera. We then discuss principles and experimental results under dynamic conditions. This paper is a revised version of one presented at the SPIE International Symposium on Optomechatronic Technologies (ISOT 2005), December 4-7, 2005 at the Sapporo Convention Center, Japan. That paper appears in SPIE Proceedings Vol.6049, 60490I.