Development of compound refractive lenses made of quartz glass designed for microdiffraction system at BL13XU in SPring-8

Abstract

We developed compound refractive lenses made of quartz glass for wide range of X-ray energy and investigated the focusing performance. The lenses for X-ray energy of 10, 12.4, 15, 20, 25, 30 keV were fabricated by optical lithography and dry etching techniques. Two lenses with the focal distance of 100 and 200 mm were combined in a crossed geometry to achieve two dimensional focusing. The measurements of the focusing properties were performed at beamline BL13XU in SPring-8 with a high-resolution microdiffraction system. The microbeams with the beam size less than 3.2 μm in both vertical and horizontal direction were obtained at all the energies. We also investigated the influence of the local lens condition to the focusing ability. It is found that the focal position moved depending on the illuminated position on the lens due to the shape errors, which causes the increase of the total beam size.