Abstract
In order to establish a transfer pumping system which is suitable for a fusion magnetic/nuclear environment, new turbomolecular pumps have been developed. The rotor assembly of the pumps is composed of ceramic (Si 3N 4) disks for gas compression, a ceramic shaft with turbine blades and a ceramic thrust disk. The rotor assembly is supported by gas bearings and is driven by an impulse gas turbine. A non-contact spiral-groove seal isolates the vacuum side from the high pressure side. After preliminary experiments with an 80 l/s ceramic turbomolecular pump, a medium-size ceramic pump was designed, manufactured and tested in 1988. The main specifications and a few of the vacuum characteristics of the pumps are given.
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