Abstract
AbstractThe magnetic suspended turbomolecular pump has the advantages of high power, high density and high vacuum. Its rotor assembly is composed of multiple parts assembled by different assembly relationships, which is much more complicated than the traditional motor rotor structure, and these parts will affect the rotor dynamic behavior. In order to accurately analyze the rotor dynamics of the magnetic levitation turbomolecular pump and improve the modal frequency of the rotor assembly, a glue-coating assembly process is proposed. First, the strength of the permanent magnets and the sleeve of the rotor assembly under the conditions of high speed centrifugal force is analyzed. Secondly, modal analysis and calculation of two magnetic levitation height motor rotor assemblies with different assembly processes were accomplished. Finally, conduct experimental verification. The research shows that the rotor assembly using the gluing process has higher modes compared to the rotor assembly not using the gluing process.KeywordsMagnetic suspended turbomolecular pumpRotor strengthAssembly processModal analysis
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