Abstract
A 100 kV ultrahigh vacuum high resolution scanning transmission electron microscope (UHV-HR-STEM) has been developed for the purpose of analyzing micro-volume element clean surfaces by means of total reflection angle X-ray spectroscopy (TRAXS). The instrument is provided with a thermal field emission electron gun (T-FEG) with a build-up W(100) emitter. Since the objective lens is designed to minimize the spherical aberration coefficient (Cs) of the objective pre-field to Cs = 0.52 mm, the highest theoretical resolution of 0.17 nm is achieved. Also, the specimen stage was incorporated into a small space in the objective polepiece. A clean UHV of 2.2 × 10 −8 Pa was achieved in the specimen environment by means of a dry pump system
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