Abstract
This investigation aims to develop an intelligent hybrid pneumatic-piezoelectric servo positioning system with high response, large stroke and nanometer precision. The rodless pneumatic cylinder serves to position in coarse stroke and the piezoelectric (PZT) actuator compensates fine stroke. Thus, the overall control systems become a dual-input single-output (DISO). Although the rodless pneumatic cylinder has relative higher friction force, it has the advantage of mechanism for multi-axes development. In order to develop an intelligent controller, self-organizing fuzzy sliding mode control theory (SOFSMC) is proposed here for the DISO system. SOFSMC is based on fuzzy sliding mode control (FSMC) combining with self-organizing strategy. Thus, SOFSMC has simple fuzzy rule base and on-line selforganizing ability. Besides, in order to reduce the coupling effects of the DISO system, a decoupling controller is developed. The experimental results clarify that the servo pneumatic-piezoelectric control system can achieve excellent positioning response and accuracy of 20 nm with high response for maximum stroke of 250 mm and multi-step positioning.
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