Abstract
This study aims to develop a X-Y dual-axial intelligent servo pneumatic-piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuators are implemented and verified experimentally.
Highlights
Due to the demand of industrial automation, such as semi-conductor and flat panel display industries, positioning accuracy toward the nanometer range is required, with the working range of centimeters in more than one axis
Piezoelectric actuators have the advantages of a fast response and high positioning accuracy, and have been applied in many different fields, especially in high precision positioning control
This study aims to investigate an intelligent X-Y dual-axial servo pneumatic-piezoelectric hybrid actuator for position control with dual-axes, high response, large stroke (250 mm) and nanometer accuracy (20 nm)
Summary
Due to the demand of industrial automation, such as semi-conductor and flat panel display industries, positioning accuracy toward the nanometer range is required, with the working range of centimeters in more than one axis. Research in this field has increased in recent years. With different control strategies, have been discussed. Piezoelectric actuators have the advantages of a fast response and high positioning accuracy, and have been applied in many different fields, especially in high precision positioning control. Non-linear piezoelectric actuator control was implemented by a learning self-tuning regulator [2]. Non-linear modeling of piezoelectric actuators has been discussed [3]. The path tracking control of the piezoelectric actuator was investigated using feedforward compensated PID control [4]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
