Abstract
Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.
Highlights
Microelectromechanical System (MEMS) scanning mirrors have potential applications in miniaturized Light Detection and Ranging (LiDAR) [1,2], projection display [3], and optical coherence tomography (OCT) [4,5], among others
Paper, we we propose propose aa 44 mm mm aperture aperture raster raster scanner, scanner,for forwhich which the thedesign design and and experimental measurement are demonstrated
We guessWe that thisthat phenomenon may bemay due be to due the to the large relative angle between the mirror and the frame in out-of-phase mode, which large relative angle between the mirror and the frame in out-of-phase mode, which leads leads to a non-linear effect
Summary
Microelectromechanical System (MEMS) scanning mirrors have potential applications in miniaturized Light Detection and Ranging (LiDAR) [1,2], projection display [3], and optical coherence tomography (OCT) [4,5], among others. Scanners of one resonant and one non-resonant scanning type avoid this shortcoming and can result in raster scanning patterns [13]. Micromachines 2021, 12, Micromachines 2021, 12, 378 resonant scanning type avoid this shortcoming and can result in raster scanning patterns [13]. Their resonant axis has a larger scanning angle, compared to double nonaddition, resonant axis ahas a larger scanningscanner angle, compared double non-resonant resonant their scanning. Technologies, Inc. have developed a number of related products [16,17,18] In this this paper, paper, we we propose propose aa 44 mm mm aperture aperture raster raster scanner, scanner,for forwhich which the thedesign design and and experimental measurement are demonstrated.
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
