Abstract
We have developed an electron electron ion coincidence (EEICO) analyzer for Auger photoelectron coincidence spectroscopy (APECS) and electron ion coincidence (EICO) spectroscopy. It consists of a coaxially symmetric mirror electron energy analyzer (coASMA), a miniature cylindrical mirror electron energy analyzer (CMA), a miniature time-of-flight ion mass spectrometer (TOF-MS), a xyz stage, a tilt-adjustment mechanism, and a conflat flange with an outer diameter of 203 mm. A sample surface is irradiated by synchrotron radiation, and emitted electrons are energy-analyzed and detected by the coASMA and the CMA, while desorbed ions are detected by the TOF-MS. The performance of the new EEICO analyzer was tested by measuring Si-LVV-Si-2p APECS data of clean Si(1 1 1)7 × 7 and Si(1 1 1)7 × 7 covered by dissociated H 2O, and by measuring the Auger-electron photoion coincidence (AEPICO) spectra of condensed H 2O at the 4a 1 ← O 1s resonance.
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