Abstract
Abstract We have developed a new method for detecting active oxygen using a carbon/silver-coated quartz crystal microbalance. Active oxygen is detected by monitoring the increase in frequency due to decreased carbon mass resulting from the reaction with active oxygen. Detection of atomic oxygen radical generated in an oxygen plasma device was verified for practical future application. The results show that this method allows precise measurement of atomic oxygen and accurate detection of the carbon layer’s disappearance from the frequency behavior.
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