Abstract
Polymer thin fi lms, sputtered using a polyimide target on a quartz crystal, were investigated to determine their suitability for application in active oxygen sensors. Active oxygen generated under an inductively coupled plasma (ICP), particularly atomic oxygen radicals with a fl ux of 6.93×1013 atoms/cm2/s, was successfully detected from the frequency shift using a polymer-coated quartz crystal microbalance (QCM). To investigate the reaction mechanism between the polymer surface and atomic oxygen, chemical bonding was evaluated by electron spectroscopy for chemical analysis (ESCA) and surface morphology by atomic force microscopy (AFM). We also compared sputtercoated polymers with spin-coated polymers in terms of their sensing characteristics. We found that a sputter-coated polymer QCM has a great potential for atomic oxygen sensing.
Highlights
Sensors and Materials, Vol 22, No 2 (2010)Such measurement requires costly specialized equipment incorporating a laser optical system[1] or a vacuum ultraviolet light source,(2,3) such that a reasonably priced and simple method of real-time sensing is not currently available to the best of our knowledge.A quartz crystal microbalance (QCM) is a sensor device that is capable of the nanogram-order measurement of changes in mass on the surface of a quartz crystal by observing shifts in resonant frequency.[4]
A quartz crystal microbalance (QCM) is a sensor device that is capable of the nanogram-order measurement of changes in mass on the surface of a quartz crystal by observing shifts in resonant frequency.[4] this method can have different gassensing applications by selecting the appropriate electrode material to be formed on the quartz crystal as the detection layer.[5]. In our previous study, we verified the atomic oxygen sensing and accuracy of carbon-coated and silver-coated QCMs.[6] the silver-coated QCM is highly sensitive, frequency changes rapidly over several seconds and without any linearity as a result of the marked surface oxidation by atomic oxygen
To pumping system frequency increased linearly to 86 Hz for over 9 min. This frequency shift value is ca. four times larger than the result obtained with the carbon-coated QCM (22 Hz) under the same irradiation conditions that correspond to an atomic oxygen flux of 6.93×1013 atoms/ cm2/s.(9)
Summary
Sensors and Materials, Vol 22, No 2 (2010)Such measurement requires costly specialized equipment incorporating a laser optical system[1] or a vacuum ultraviolet light source,(2,3) such that a reasonably priced and simple method of real-time sensing is not currently available to the best of our knowledge.A quartz crystal microbalance (QCM) is a sensor device that is capable of the nanogram-order measurement of changes in mass on the surface of a quartz crystal by observing shifts in resonant frequency.[4]. Sensors and Materials, Vol 22, No 2 (2010) Such measurement requires costly specialized equipment incorporating a laser optical system[1] or a vacuum ultraviolet light source,(2,3) such that a reasonably priced and simple method of real-time sensing is not currently available to the best of our knowledge. A reproducible mass is indispensable from the viewpoint of practical use. This is disadvantageous when carbon thin films are applied to processes that require atomic oxygen sensing over a longer duration
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