Abstract
A temperature-compensated surface acoustic wave (SAW) device was developed to build a wireless and passive strain sensor. Y-cut 35° X quartz with perfect temperature stability was employed as the piezoelectric substrate of the sensing device patterned by one-port resonator. Optimization by coupling of modes (COM) model towards sensing chip was conducted to determine the optimal design parameters, which offers lager Q-value. The prepared sensing device by standard photolithographic technique operating at 434MHz was characterized wirelessly. High strain sensitivity, excellent temperature stability, and high resolution were achieved in the wireless measurements.
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