Abstract
A temperature-compensated surface acoustic wave (SAW) device was developed to build a wireless and passive strain sensor. Y-cut 35° X quartz with perfect temperature stability was employed as the piezoelectric substrate of the sensing device patterned by one-port resonator. Optimization by coupling of modes (COM) model towards sensing chip was conducted to determine the optimal design parameters, which offers lager Q-value. The prepared sensing device by standard photolithographic technique operating at 434MHz was characterized wirelessly. High strain sensitivity, excellent temperature stability, and high resolution were achieved in the wireless measurements.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have