Abstract
An inner coating system using transported coaxial ECR plasma has been developed. ECR plasmas were generated inside a coaxial tube and were transported along the tube axis using the control system for an applied magnetic field which consists of a computer, switching regulator and five solenoid coils. The microwave was introduced into the coaxial tube, which was composed of target (center conductor) and substrate tube (outer conductor), in the TEM mode that has no cut-off wavelength. Electron temperature and density were measured by using several Langmuir probes and the characteristics of discharge were also investigated at various pressures, microwave powers and magnetic flux densities.
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