Development of a reflective optical encoder with submicron accuracy

Abstract

Signal distortion is a key issue that limits the measurement resolution and accuracy of optical encoders. In this paper, an optical encoder based on generalized grating imaging using a two-dimensional index grating is presented. The general expression of intensity distribution for generalized grating imaging including the relative displacement between the scale grating and the reading head is derived, and the formation of the signal distortion of the optical encoder is analyzed. Then, a two-dimensional index grating, which consists of multiple grating tracks with defined offsets, is proposed to suppress the dominant third and fifth order harmonic signals. The operating principle of the two-dimensional index grating is explained in detail and a reflective optical encoder is developed. In the experiment, approximately ideal Lissajous figure of the encoder signals is obtained. Fourier analysis of the encoder signals shows that both the third and fifth order harmonic distortions are below 0.6%. Experimental results show that the interpolation error of the optical encoder is within ±0.18μm, and the accuracy is better than ±0.3μm over 255 mm travel range with a maximum variation of 0.136 μm.