Abstract
Employing palladium and copper nanowires (Pd/Cu NWs) as the sensitive interface, a new surface acoustic wave (SAW) sensor with fast response and recovery was developed successfully for hydrogen gas sensing. The adsorption in Pd/Cu NWs towards hydrogen molecules modulates the SAW propagation by the induced acoustoelectric coupling effect from the changes in the resistivity of Pd, and the corresponding shifts in oscillation frequency proportional to gas concentration was collected as the sensor signal. Larger surface-to-volume of the Pd/Cu NWs contributes to improve the response speed and sensitivity. A 150 MHz SAW device with delay line pattern was fabricated photolithographically on 128° YX LiNbO3 substrate, and the Pd/Cu NWs that synthesized by optimized electrochemical deposition were dissolved in ethanol and deposited onto the SAW device surface by dropping method to build the SAW hydrogen sensors. The prepared SAW sensors were characterized by using the differential oscillation loop experimentally, excellent repeatability, fast response and recovery within 4s, and a sensitivity of 1.5 kHz/%were achieved at room temperature (25°C). Additionally, the response mechanism in hydrogen sensing was investigated experimentally.
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