Abstract

This work proposes a surface acoustic wave (SAW) hydrogen sensor based on the decoration of graphene oxide (GO) by palladium nanoparticles on AIN/Si layered structure. A thin decoration of GO by palladium nanoparticles layer is directly coated on the sensor surface as sensing layer. The SAW hydrogen sensor shows higher sensitivity (∼9.5 times) and lower cross-sensitivity towards NO 2 compared to those based on graphene oxide only. The hydrogen sensor has good stability and fast response ( $\text{Tres} =6\mathrm{s}, \text{Trec} =7\mathrm{s}$ ). The frequency shift of the sensor with hydrogen concentration change is described by a fitting formula.

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