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Abstract
<p class="1Body">This paper reports the development of a micro-heater array device that can be selectively heated at an arbitrary location. To confirm the heating characteristics of this micro-heater array device, heating experiments using a thermo-responsive gel were conducted. Since a micro-heater can supply heat with a rapid-response on a micro-scale, various applications have been studied. Based on these characteristics, micro-heaters have often been used in recent research applications involving biological cells. To expand the versatility of the micro-heater, the development of micro-heater array systems that can supply heat selectively at an arbitrary location is required. In this work, to support micro-heater applications in the field of biochemistry, the design and materials of a micro-heater array device were optimized and a fabrication process was established. Furthermore, the usefulness of this device was verified using a thermo-responsive gel, and control of the temperature distribution on a glass substrate was successfully demonstrated. This micro-heater array device can be heated with regional selectivity, and each region can be controlled to an arbitrary temperature, so the device is also capable of generating temperature gradients.<strong></strong></p>
Highlights
A micro-heater can reliably supply heat and has a rapid response
This paper reports the development of a micro-heater array device that can be selectively heated at an arbitrary location
To support micro-heater applications in the field of biochemistry, the design and materials of a micro-heater array device were optimized and a fabrication process was established. The usefulness of this device was verified using a thermo-responsive gel, and control of the temperature distribution on a glass substrate was successfully demonstrated. This micro-heater array device can be heated with regional selectivity, and each region can be controlled to an arbitrary temperature, so the device is capable of generating temperature gradients
Summary
Because micro-heaters can be fabricated from a variety of materials, they can offer high reliability, long operational lifetimes, inexpensive fabrication, and high shape flexibility, such as a coil shape Based on these characteristics and their high response at the micro-scale, micro-heater arrays for a number of applications have been investigated. Since nichrome has a high ductility and good corrosion and acid resistance, it can be sealed in an extra-fine tube for use at the micro-scale Since these materials can be fabricated using MEMS technology, their integration on a chip is possible (Sima et al, 2013; Das & Akhta., 2013; Mamanee et al, 2008; Lyulevich & Yaminskii, 2000; Weir et al, 2009; Shukla et al, 2009; Haque et al, 2008; De Luca et al, 2015). In many micro-heater devices, the basic heating principal involves supplying an electrical voltage to a heater element
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