Abstract
Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.
Highlights
Read more 
Summary
Sign-in/Register to view highlights & summary Full Text
Published Version (
Free)
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call