Development of a new displacement-measuring ultrasonic sensor based on astigmatic focus error detection-measuring principle and its demonstration

Abstract

Conventional ultrasonic displacement-measuring systems normally employ the pulse-echo technique. Resultant resolution capability, however, typically is not suitable for meeting high-dimensional, in-process measurement standards used in cutting and grinding operations. This paper presents a new ultrasonic sensor for displacement measurement based on astigmatic focus error detection. The measuring principle and basic analysis applied in the design method are described in detail, after which the validity of the principle is demonstrated by the results of experimental evaluations.